Tags: Chemical Compound, Chemical Substance.
Trichlorosilane is an inorganic compound with the formula HSiCl3. It is a colourless volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water it rapidly decomposes to produce a silicone polymer while giving off hydrochloric acid. Because of its reactivity and wide availability it is frequently used in the synthesis of silicon-containing organic compounds.
