Tags: Chemical Compound, Chemical Substance.

Tetrakis(dimethylamino)titanium (TDMAT) is a chemical compound. The compound is generally classified as a metalorganic species meaning that its properties are strongly influenced by the organic ligands but the compound lacks metal-carbon bonds. It is used in chemical vapor deposition to prepare a titanium nitride (TiN) surfaces. The prefix tetrakis refers the presence of four of the same ligand in this case dimethylamides.

Ti(NMe2)4.png

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