Tags: Chemical Compound, Chemical Substance.

Octadecyltrichlorosilane (ODTS or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH3(CH2)17SiCl3. It is flammable reacts with water and is also sensitive to air. It is corrosive and can severely damage mucous membranes.

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