Tags: Chemical Compound, Chemical Substance.
Isobutylgermane (IBGe Chemical formula: (CH3)2CHCH2GeH3) is an organogermanium compound. It is a colourless volatile liquid that is used in MOVPE (Metalorganic Vapor Phase Epitaxy) as an alternative to germane. IBGe is used in the deposition of Ge films and Ge-containing thin semiconductor films such as SiGe in strained silicon application and GeSbTe in NAND Flash applications.
