Tags: Chemical Compound, Chemical Substance.
Dichlorosilane or DCS as it is commonly known is a chemical compound with the formula H2SiCl2. In its major use it is mixed with ammonia (NH3) in LPCVD chambers to grow silicon nitride in semiconductor processing. A higher concentration of DCS:NH3 (i.e. 16:1) usually results in lower stress nitride films.It is an intermediate between silane and silicon tetrachloride.
